Materials Research Laboratory
Ellipsometry
Measures index of refraction, absorption, and thickness of multilayers
Instruments: J.A. Woollam VASE and Gaertner L116C
Ellipsometry measures the change in polarization state of light reflected from a surface. This change is sensitive to several material characteristics, such as:
- Layer thickness
- Optical constants (refractive index and extinction coefficient)
- Surface roughness
- Composition
- Optical anisotropy
which can be obtained from fitting the experimental data to theoretically generated data from an optical model corresponding to the analyzed sample.
Our instruments: